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InhaltsangabeIntroduction. Pyrolytic LCVD. Photolytic LCVD. Pyrolytic LCVD Modeling. Photolytic LCVD Modeling. Appendix A: Definitions of Energy Density, Irradiance, and Intensity. Appendix B: Thermal Stress Analysis. Appendix C: Volumetric Absorption Rate. Appendix D: Physical Constants and Conversion Factor. Index.

Discusses principles of physicochemical phenomena and shows how they can be applied to develop theories about various types of laser chemical vapor deposition (LCVD) processes, and offers an understanding of the design and control of an LCVD system. Overviews safety issues, explains the basic theories of pyrolytic and photolytic processes, and deta