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Zusatztext
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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
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Kurztext
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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.
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Detailansicht
Design and Manufacturing of Active Microsystems
eBook - Microtechnology and MEMS
ISBN/EAN: 9783642129032
Umbreit-Nr.: 1707481
Sprache:
Englisch
Umfang: 444 S., 56.88 MB
Format in cm:
Einband:
Keine Angabe
Erschienen am 04.03.2011
Auflage: 1/2011
E-Book
Format: PDF
DRM: Digitales Wasserzeichen