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Zusatztext
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Inhaltsangabe1. Introduction.- 2. Design and Construction.- 3. Guiding and Measuring in Active Microsystems.- 4. Manufacturing and Fabrication.- 5. Microassembly.- 6.Industrial Applications.
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Kurztext
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This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.
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Detailansicht
Design and Manufacturing of Active Microsystems
Microtechnology and MEMS
ISBN/EAN: 9783642267383
Umbreit-Nr.: 4624238
Sprache:
Englisch
Umfang: xii, 444 S., 319 s/w Illustr., 33 farbige Illustr.
Format in cm:
Einband:
kartoniertes Buch
Erschienen am 21.03.2014
Auflage: 1/2014